1.8”, 12” wafer loading capacity

2. FOUB/FOSB Loadport Module

3. With opner to achieve seamless wafer supply by changing the arm, macro visual inspection rejection registration,

4. Microscopic inspection to measure SW

5. Precise wafer sensing with state-of-the-art loadport modules

6. Simple and cost-effective automated wafer handling and inspection equipment High-resolution pre-aligner and macro tilt

7. Module 1000-class wafer transfer robot Standard loadport module for higher wafer mapping sensitivity User-friendly latest user interface and operating system software technology

8. Ergonomics, Cognitive Engineering Design and Interface Windows-based programs on touchscreen PCs Macro/Micro (tilted, back/center)

9. Detect BCR/ RFID/ OCR reader option Free moving clutch stage 

10. Rotating vacuum chuck for optimal stability of wafer handling