Function: (line scan inspection) :

1.replace IRIS(ASML); PDS(Nikon)

2.Glass  & Pellicle inspection: 

Glass  & Pellicle inspection: 

1.Greater than >5um defect size detectable capability

2.Particle remove function for glass and pellicle side (option)

3.Canon ,Nikon, and ASML mask compatible

4.Review defect picture by in-line and off-line

5.SECS GEM interface with customer IT